Publicaties van auteur Chen, Z.H.
Leguijt, C.; Lölgen, P.; Eikelboom, J.A.; Amesz, P.H.; Steeman, R.A.; Sinke, W.C.; Sarro, P.M.; Verhoef, L.A.; Michiels, P.P.; Chen, Z.H.; Rohatgi, A.;
Very low surface recombination velocities on 2.5 cm Si wafers, obtained with low-temperature PECVD of Si-oxide and Si-nitride
ECN-RX--93-098
1993;
3 pag.
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