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Titel:
Hydrogen passivation of iron in multicrystalline silicon
 
Auteur(s):
 
Gepubliceerd door: Publicatie datum:
ECN Zonne-energie 1-8-2003
 
ECN publicatienummer: Publicatie type:
ECN-RX--03-055 Conferentiebijdrage
 
Aantal pagina's: Volledige tekst:
4 Download PDF  (512kB)

Gepresenteerd op: 13th Workshop on Crystalline Silicon Solar Cell Materials and Processes, Vail CO, USA, 10-13 augustus 2003.

Samenvatting:
Concentrations of interstitially dissolved Fe can be measured by lifetimemeasurements before and after dissociation of FeB pairs. It allows the measurement of iron concentrations as low as 5x1010 cm-3. The technique is applied to determine the change in Fe concentration after different solar cell process steps. In particular, hydrogen passivation of iron in multicrystalline silicon wafers is investigated. The results indicate that the passivation can be accurately followed with this technique.


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